Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1619-1623, 1995 DOI10.1116/1.579740 Export Citation Effect of the Substrate State on the Formation of Diamond Film in a Low-Temperature Microwave-Plasma-Enhanced Chemical-Vapor-Deposition System Kim SH, Park YS, Jung SK, Kang DH, Lee JW Keywords:LOW-PRESSURE;PARTICLES;GROWTH Please enable JavaScript to view the comments powered by Disqus.
