Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1224-1228, 1995 DOI10.1116/1.579865 Export Citation Scanning Photoelectron Microscope Ninomiya K, Hasegawa M Keywords:X-RAY ABSORPTION;LATERAL RESOLUTION;SPECTROSCOPY;MIRROR Please enable JavaScript to view the comments powered by Disqus.