Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1188-1191, 1995 DOI10.1116/1.579859 Export Citation Reactive Direct-Current Magnetron Sputtering of Aluminum-Oxide Coatings Sproul WD, Graham ME, Wong MS, Lopez S, Li D, Scholl RA Keywords:DEPOSITION;AL2O3 Please enable JavaScript to view the comments powered by Disqus.
