Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 1145-1149, 1995 DOI10.1116/1.579601 Export Citation Spectroscopic Ellipsometry of Thin-Films on Transparent Substrates - A Formalism for Data Interpretation Yang YH, Abelson JR Please enable JavaScript to view the comments powered by Disqus.