Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 719-723, 1995 DOI10.1116/1.579814 Export Citation Outdiffusion of Deuterium from GaN, AlN, and Inn Wilson RG, Pearton SJ, Abernathy CR, Zavada JM Please enable JavaScript to view the comments powered by Disqus.