Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.3, 662-665, 1995 DOI10.1116/1.579803 Export Citation Sb Ion-Implantation and Annealing of Sigec Heteroepitaxial Layers on Si(001) Garcia R, Daley KE, Sego S, Culbertson RJ, Poker DB Keywords:SI1-XGEX ALLOY LAYERS;STRAIN Please enable JavaScript to view the comments powered by Disqus.
