Journal of Vacuum Science & Technology A, Vol.13, No.2, 178-182, 1995
Thermal-Reactions of Fluorocarbon and Hydrofluorocarbon Species on Si(100)-(2X1)-CF3I, Cf3Ch2I, and C2F4
Keywords:BETA-HYDRIDE ELIMINATION;FREE-RADICALS;SURFACE-CHEMISTRY;SILICON;DESORPTION;ADSORPTION;FLUORINE;DECOMPOSITION;CHEMISORPTION;MECHANISM