Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.1, 47-53, 1995 DOI10.1116/1.579442 Export Citation Study of Tunneling Current Oscillation Dependence on SiO2 Thickness and Si Roughness at the Si SiO2 Interface Zafar S, Liu Q, Irene EA Keywords:SILICON Please enable JavaScript to view the comments powered by Disqus.