Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.13, No.1, 17-20, 1995 DOI10.1116/1.579435 Export Citation Studies of Ag Films Deposited Using Partially-Ionized Beam Deposition Ren ZM, Du YC, He MQ, Ying ZF, Xiong XX, Li FM, Su Y, Chen LY, Brown WL Keywords:CLUSTER-BEAM;EPITAXIAL-GROWTH;THIN-FILMS;ALUMINUM;POLYETHYLENE;SI(111);OXIDE;GAAS;SI Please enable JavaScript to view the comments powered by Disqus.
