Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.12, No.6, 3149-3151, 1994 DOI10.1116/1.579229 Export Citation Estimation of Indium-to-Germanium and Gallium-to-Germanium Sputtering Yield Ratios Using Cosputtering Deposition Comedi D, Fajardo F, Chambouleyron I, Tabacniks M Please enable JavaScript to view the comments powered by Disqus.
