Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.12, No.6, 3091-3094, 1994 DOI10.1116/1.578941 Export Citation Damage and Contamination in Low-Temperature Electron-Cyclotron-Resonance Plasma-Etching Whang KW, Lee SH, Doh HH, Kim JS Please enable JavaScript to view the comments powered by Disqus.
