Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.12, No.6, 3074-3081, 1994 DOI10.1116/1.578938 Export Citation Growth and Characterization of Cubic Boron-Nitride Thin-Films Kester DJ, Ailey KS, Lichtenwalner DJ, Davis RF Keywords:INTRINSIC STRESS;C-BN;TEMPERATURE;DEPOSITION;SI;SILICON;GAS Please enable JavaScript to view the comments powered by Disqus.
