Previous Article Next Article Table of Contents Journal of Vacuum Science & Technology A, Vol.12, No.6, 3048-3053, 1994 DOI10.1116/1.578934 Export Citation Amorphous Nitrogenated Carbon-Films - Structural Modifications Induced by Thermal Annealing Freire FL, Achete CA, Mariotto G, Canteri R Keywords:THIN-FILMS;RAMAN-SPECTROSCOPY;SCATTERING;HYDROGEN;GRAPHITE;SILICON Please enable JavaScript to view the comments powered by Disqus.
