Journal of Vacuum Science & Technology A, Vol.12, No.6, 3040-3047, 1994
Ga-CH3 Bond Scission by Atomic-H - The Depletion of Surface Carbon from a Gallium Alkyl Film on Silicon Dioxide
Keywords:VIBRATIONAL-EXCITATION;THERMAL-DECOMPOSITION;HYDROGEN DESORPTION;MONOHYDRIDE PHASE;SI(100);TRIMETHYLGALLIUM;GAS;TRIMETHYLALUMINUM;EXTRACTION;INTERFACE