Journal of Vacuum Science & Technology A, Vol.12, No.4, 1772-1777, 1994
Model for Water Outgassing from Metal-Surfaces .2.
The outgassing rate from an electropolished stainless steel (type 304) surface is measured after the surface is exposed to H2O vapor at presSureS (p0) of 10(-3)-10 Torr for exposure periods (t0) of 3-600 min. The system is kept at 310, 350, or 390 K during H2O exposures and subsequent outgassing measurements. Our data show that the outgassing rate is proportional to p0n, where n = 0.3, 0.26, 0.25 for T = 310, 350, 390 K, respectively. The adsorption rate, defined as the quantity of H2O being adsorbed during exposures per unit time, is proportional to 1/t0. Continuing the previous work [Li and Dylla, J. Vac. Sci. Technol. A 11, 1702 (1993)] on correlating the outgassing with the source distribution of sorbed gas, we prove that the practical expression for the outgassing rate, Q(t) = Q10/t(alpha), can be derived from a H2O concentration falling as (1/X)2alpha-1 With the Spatial variable x defined as the distance away from the surface. The observed dependence of the outgassing rate on the exposure conditions is consistent with the predictions of this simple model.