Journal of Vacuum Science & Technology A, Vol.12, No.2, 591-593, 1994
Compact and Inexpensive Quartz Capillaritron Source
A new durable and reliable capillaritron source for ion and atom beams with particle energies in the range between 1 and 15 keV has been designed using very few and inexpensive components. The quartz capillaritron source may be used for ion and atom beam generation or it can operate as a complete sputter deposition system. The energy spread of argon ions can be adjusted below 10% of the maximum energy of the ions (i.e., 200 eV for 3 keV argon ions). The portion of ions in the particle beam could be varied from 0% to 40%.
Keywords:ION-SOURCE