Journal of Vacuum Science & Technology A, Vol.12, No.1, 61-68, 1994
3-Dimensional Simulation of Surface Evolution During Growth and Erosion
A concise review of the basic ideas of the generalized kinematic model of surface evolution during growth and erosion is presented. Interpretation of the main results of this model as well as some specific rules and advice as to how this model is applied in practical simulations are also presented. It is concluded that three-dimensional (3D) computer simulation of surface evolution is only possible by the use of adequate, theoretically motivated numerical methods. As a demonstration, 3D topography simulations during broad and focused ion beam bombardment, chemical vapor deposition, and reactive ion etching using the 3D code DINESE are also presented.
Keywords:SPUTTERED AMORPHOUS SOLIDS;ION-BOMBARDMENT;COMPUTER-SIMULATION;EQUILIBRIUM TOPOGRAPHY;KINEMATIC THEORY;MODEL;DISSOLUTION;CONTOUR