Barium titanate microstructures are fabricated on (100) silicon/platinum substrates coated with photoresist and titanium by combination of hydrothermal and lift-off techniques. The microstructures are well defined and adhere well to the substrate. The profiles of the line structure are twice as thick as the starting titanium structures due to the reaction of the titanium layer with the barium ions from the aqueous solution. Analysis by x-ray diffraction shows that the barium titanate grows in its cubic phase and that the titanium layer is not consumed completely by the hydrothermal reaction.