The SF6 adsorption isotherms on zeolite 13X, zeolite NaY, activated carbon, and silica gel were investigated over a temperature range of 298-358 K and at pressure from 0 to 1000 kPa. Experimental results demonstrated that the adsorption capacity of SF6 was in the order AC > NaY > 13X > silica gel under the same adsorption pressure and temperature conditions. Moreover, the equilibrium isotherm data of SF6 on different adsorbents were fitted with Langmuir, Langmuir-Freundlich, and Toth models. The agreement between the fitting isotherms and the experimental data increased with the increase of available fitting parameters in the equation of the isotherm model, and the Toth model was verified to be the best alternative for describing adsorption behaviors of SF6. Furthermore, the isosteric heats of adsorption of SF6 on adsorbents were calculated by the Clausius-Clapeyron equation. Heats of adsorption of SF6 on the four adsorbents first decreased and then increased with increasing SF6 loading.