화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.144, No.3, 1024-1027, 1997
Thermodynamic Considerations of the Role of Hydrogen in Sublimation Growth of Silicon-Carbide
The purpose of this study was to investigate the thermodynamic consequences of added hydrogen to the sublimation growth process of silicon carbide crystals. The results show that at each temperature there exists a level of hydrogen that leads to a silicon-to-carbon ratio of unity. At typical growth temperatures the added hydrogen does not significantly affect the supersaturation ratio.