The materials containing titanium supported on stainless steel foil 12X18N10T (AISI 321) were prepared by low temperature ion implantation method. Samples were investigated by means of XRD, SAXS, AFM, XPS and SEM methods. Any reflexes of titanium compounds were determined (XRD) but XPS data permit to identify the presence of titanium nitride, its oxide and oxynitride on surface samples. It was shown, that the synthesized samples are more active in visible range than under UV irradiation in photodegradation of benzene in aqueous solutions. Influence of pretreatment temperature on photoactivity of the samples is connected with nitrogen removal from synthesized composites.