Results of primary and secondary current distributions in geometries containing different length scales are presented. Both two- and three-dimensional problems are considered. Recommendations for treating multiple-length scale problems are made, and one methodology for solving primary and secondary current distributions on workpieces containing numerous features is presented. It is assumed that the workpiece is composed of patterns, each of which are composed of features. It is shown how the mathematical model gives good estimates of current distribution on the workpiece, pattern, and feature scales.