화학공학소재연구정보센터
Journal of the Electrochemical Society, Vol.141, No.1, 184-187, 1994
Dynamic Dilution Calibration System for Calibrating Analytical Instruments Used in Gas-Analysis
A dynamic dilution system, utilizing single dilution, is described that generates sub ppb concentration of impurities in bulk nitrogen. An atmospheric pressure ionization mass spectrometer (APIMS) is used to verify the linearity of the dilution system. This system is used to obtain limits of detection of a commercially available single quadrupole APIMS for detecting methane, moisture, oxygen, and carbon dioxide in high purity nitrogen.