Layers of tungsten were deposited on two types of graphite substrates at three different angular position by a low energy plasma focus device. First series of substrates included only raw graphite while carbon interlayers were used for the second type. Tungsten deposition process was carried out at 0 degrees, 15 degrees, and 30 degrees angular location with respect to the device anode axis during 40 focus shots at optimum argon gas pressure. The characterization of the deposited tungsten coatings was verified by X-ray diffraction (XRD), scanning electron microscopy, energy-dispersive X-ray spectroscopy, Raman spectroscopy and Nanoindentation analyses. Tungsten-carbon structures such as WC1-x, W2C, WC, and W-2(C, O) were detected by XRD analysis. Compounds such as WC1-x, W2C and W-2(C, O) were identified on raw graphite substrate while WC1-x, WC, W2C were formed on the graphite substrates with carbon interlayer. For both types of samples positioned at 30 degrees with respect to device axis, the WC1-x, phase, which is a high temperature structure with high melting point, was detected more than other tungsten-carbon structures. The coating of carbon interlayer on substrates changes surface morphologies and leads to homogenous deposition of tungsten layer on the surface. The increase in angular position of substrates led to creation of flat and smooth surfaces. Raman spectroscopy shows the presence of WO3 and amorphous carbon structures in both types of prepared samples. Nanoindentation analysis indicates that the hardness of samples increases after tungsten deposition process. The substrate angular position with respect to anode axis is an effective parameter in deposition process of tungsten layers.