화학공학소재연구정보센터
Solid-State Electronics, Vol.159, 3-11, 2019
Doping profile extraction in thin SOI films: Application to A2RAM
We propose for the first time a method based on C-V measurement to extract the bridge doping profile which governs the operation and performance of A2RAM capacitorless memory cell. Assessed with TCAD simulation and simple extraction model adapted from bulk devices, this technique is validated with experimental data.