The TiSiN coating was prepared by arc ion plating to improve wear resistance of titanium alloy at elevated temperatures. The thickness of 1.97 mu m and the columnar crystal were observed in cross section image. It was found that the TiSiN coating had a lower friction coefficient at high temperatures than at room temperature. Nevertheless, the rising wear rate at the temperature of 500 degrees C indicated the destruction of the coating. The friction process would destroy the columnar crystal and generate oxide, amorphous phase and a lot of nanocrystalline with defects. Meanwhile, an amount of cracks were found in the coating at 500 degrees C which allowed oxygen get in touch with the interior of the coating and resulted in a more serious oxidization.