The conditions for the deposition of stable superhydrophobic coatings on glass substrates using a dielectric barrier discharge plasma jet with tetramethylsilane (TMS) and 3-aminopropyl(diethoxy) methylsilane (APDMES) as precursors were investigated. The coatings, which were formed under different plasma conditions, were characterized by various methods including atomic force microscopy, scanning electron microscopy, Fourier transform infrared spectroscopy, X-ray photoelectron spectroscopy, static water contact angle (WCA) and sliding angle measurement, and a scratch test. The results presented that superhydrophobic and mechanically stable plasma coatings could be obtained by optimizing the treatment time, applied voltage, gas flow rate into the plasma chamber, and APDMES/TMS ratio. The results indicated that the use of TMS on its own as the coating precursor led to the formation of unstable coatings. However, the mechanical stability increased significantly when APDMES and TMS were used in combination. As a result, a durable coating layer with a WCA of 163 degrees and sliding angle of 3 degrees was achieved for an APDMES/TMS ratio of 1.7.