Controlled process conditions enabled the fabrication of well-defined, high quality, and reproducible waveguides. Multifactor lithographic process conditions have been achieved in order to fabricate 3D single mode waveguide. Preheating and post-baking processes are the most important factors. Sol gel materials form an intermediate bridge between glasses and polymers which allow doping of many metal ions or functional materials to the system to extend its capabilities in high performance and active devices, such as modulation, lasing (amplifying), beam splitters, couplers, deflectors, wavelength filters and switches. It was found that the single mode or multimode waveguide can be fabricated with single step spin coating.