Dense uniform films of CaZr0.9YO3-delta (CZY) electrolyte were grown on porous supporting SrTi0.8Fe0.2O3-delta (STF) electrodes via modified chemical solution deposition technique. Liquid precursor for the film deposition was prepared using a solution of inorganic salts in ethanol and a nanopowder obtained from this solution by drying and precalcining at 550 degrees C. A complex of techniques including X-Ray Diffraction, Scanning Electron Microscopy and Impedance Spectroscopy were utilized to characterize phase purity, morphological and electrical properties of the deposited films. Distribution of relaxation times was used for separation of the bulk and grain boundary contributions to the total conductivity of the films from the impedance spectra. The suggested modification allows not only reducing the number of liquid precursor deposition steps for fabrication of dense films, but also increasing grain size and conductivity of the films.