Method of vacuum thermal evaporation of small amounts of material was used for the formation of nanoparticles in Au-Cu and In-Sn bicomponent systems. The obtained arrays were investigated by Transmission Electron Microscopy. It was found that after the sequential deposition of copper on gold there was formed an array of Au-Cu alloy particles. The lattice parameter of this alloy occupies an intermediate position between the parameters of Au and Cu. Sequential deposition of In and Sn and annealing of the resulting structure do not lead to the formation of In-Sn alloy. The array is the mixture of particles of two types: some contain In, and others contain Sn. In case of co-evaporation of In and Sn in eutectic proportion the resulting array is the mixture of In3Sn beta-phase particles and InSn4 gamma-phase particles.