화학공학소재연구정보센터
Journal of Crystal Growth, Vol.509, 87-90, 2019
High throughput MOVPE and accelerated growth rate of GaAs for PV application
We present the feasibility of metalorganic vapor phase epitaxy (MOVPE) with extremely high-speed growth of GaAs for solar cell applications. The growth rate was increased up to 120 mu m/h, and exhibited an almost linear relationship with the amount of supplied trimethylgallium (TMGa). The thickness variation and doped carrier concentration of GaAs grown at 90 mu m/h were comparable to those of conventionally grown GaAs at a lower growth rate. The potential for reducing the V/III supply ratio was investigated to reduce the material cost. Nondoped GaAs wafers were grown at the accelerated growth rate of 90 mu m/h, with various V/III ratios. The growth rate of GaAs increased by 20% when the V/III ratio was decreased from 40 to 5. In low temperature photoluminescence (PL) measurement, significant change in PL spectra was not observed, indicating that there was no significant change in quality. The light-power conversion efficiency was almost comparable for V/III ratios from 10 to 40 whereas that at the lowest V/III ratio of 5 was degraded. Photovoltaic (PV) solar cells of GaAs were fabricated with various growth condition. It is found that the performance of the cells grown at 90 mu m/h were comparable with previous results.