In this work, a high performance impedance-type humidity sensor based on Europium-doped ZnO with abundant surface oxygen vacancy defects was synthesized by sol-gel method. Response of the Eu-doped ZnO with different molar ratio were investigated by exposing them to humidity environments in wide range of 11-95% RH at room temperature. The Eu-doped ZnO (2 mol%) exhibits a three orders impedance change, along with short response/recovery time (5 s/19 s), low hysteresis and best linearity. Complex impedance spectra indicates that dopant Eu can enhance humidity sensing performance of ZnO, which is resulted from the introduction of Eu3+ ions into ZnO structure to produce more defects of surface oxygen vacancy and more active sites on the surface of ZnO. The results show that this is a feasible method to achieve high humidity sensing performance by Eu doped ZnO, which make it a promising candidate for humidity sensing materials and broaden the use of ZnO materials.