A new concept of gas purification by electron attachment is proposed. Low-energy electrons generated in a corona-discharge reactor are captured by electronegative impurities, producing negative ions. The ions drift to the anode in the electric field and are removed at the anode of the reactor. Two types of reactors were used to remove the negative ions : a deposition-type reactor, which deposits negative ions at the anode surface; a sweep-out-type reactor, which sweeps out enriched electronegative impurities through the porous anode. Removals of dilute sulfur compounds, oxygen and iodine from nitrogen were conducted to verify the concept of gas purification. Simulation models were used to estimate removal efficiencies of these compounds, by taking into account electron attachment, and experimental constants of the models were determined. The removal efficiency correlated by the models agreed well with the experimental one.