Applied Surface Science, Vol.476, 221-231, 2019
Femtosecond-laser-induced modifications of Ge2Sb2Te5 thin films: Permanent optical change without amorphization
Modifications induced by ultrashort laser pulses have been investigated in crystalline Ge2Sb2Te5 thin films. The observations comprise optical and structural changes, amorphization, and ablation. By combining optical microscopy and cross-sectional scanning- and transmission electron microscopy, it is found that the threshold for permanent change of the optical properties of Ge2Sb2Te5 - responsible for the reduced optical reflectivity - is slightly lower than that for amorphization; no further change in reflectivity is seen upon amorphization. The laser-fluence thresholds for amorphization and change of the optical properties both show a strong dependence on film thickness that can be explained thermally by two-temperature simulations. In the case of sufficiently thick films, two distinct low- and high-fluence ablation thresholds are found. The mechanisms of the ablation thresholds are discussed, and it is concluded that ablation in the low-fluence regime proceeds by photomechanical spallation.