화학공학소재연구정보센터
Thin Solid Films, Vol.667, 7-10, 2018
Preparation of novel photosensitive indium niobate gel films and their characteristics
In this study, preparation of photosensitive indium niobate (InNbO4) gel films by using a chemical modification reagent and their characteristics were investigated. In the electronic absorption spectra of the InNbO4 gel films, the absorption peak assigned a chelate ring was observed at 340 nm, this peak intensity decreased by UV irradiation. From this result, the obtained gel films exhibit photosensitivity. About 10 mu m patterns could be fabricated. The InNbO4 film heat-treated at 600-900 degrees C exhibited diffraction peaks of monoclinic crystals and the photoinduced hydrophillic properties.