화학공학소재연구정보센터
Materials Research Bulletin, Vol.106, 234-242, 2018
Optical, morphological and durability studies of quaternary chalcogenide Ge-Sb(As)-(S,Te) films
Thin films from two glassy systems of GexSb40-xS50Te10 and GexAs40-xS50Te10, with compositions x = 10, 20 and 27 at. %, were deposited on optical glass substrates by vacuum thermal evaporation of powdered parent chalcogenide glasses. The complex refractive index and dielectric constants of the films are determined by ellipsometry in a wide spectral range of 0.25-30 mu m. In the transparent spectral region of 0.6-2.5 mu m the refractive index values are within 2.9-2.3 and 3.3-2.4 for the As-contained and Sb-contained films, respectively. From the IR and Raman data analysis the basic chemical and oxygen-related impurity bonds are identified. The films durability properties were established by applying the US Military Standard quality tests. The quality-test-induced-changes in surface morphology were evaluated. The films are relatively stable after quality test treatments, which cause a small degree of densification and surface roughening for Sb-containing films and surface flattening for As-containing ones.