Conformal multilayer TiO2/SiO2/TiO2 coatings were deposited on the surface of similar to 27 mu m spherical soda lime glass (SLG) particles using fluidized bed chemical vapor deposition at atmospheric pressure. Cost-effective precursors of titanium and silicon chlorides together with water were employed to deposit titania and silica films at 300 degrees C and room temperature, respectively. Focused ion beam cross-sectional transmission electron microscopy, scanning electron microscopy, energy-dispersive spectroscopy, X-ray photoelectron spectroscopy, Brunauer-Emmett-Teller surface area analysis, and X-ray diffraction were used to characterize the multilayer-coated particles. The results revealed a pinhole-free and uniform multilayer of anatase TiO2 and amorphous SiO2 with a thickness of similar to 110 and 20 nm. Moreover, the photodegradation performance of the coated particles was examined by the degradation of methylene blue as the model reaction. It was found that a multilayer thin film of titania and silica can effectively prevent sodium ion diffusion from the SLG microsphere substrates, thus improving the photocatalytic performance of such system.