SF6 decomposition components detection plays an important role in diagnosing and evaluating the electric discharge faults in SF6-insulated equipment. In this paper, Pt-3-supported TiO2(1 0 1) was used to study the influence of the Pt clusters modification on the gas sensing property of TiO2(1 0 1) material to the characteristic decomposition components of SF6: H2S, SO2, SOF2 and SO2F2. The theoretical calculation results show that the intrinsic TiO2(1 0 1) only shows adsorption performance to H2S. Due to the strong chemical activity of Pt-3, it significantly increases the electrical conductivity and gas sensing properties of TiO2(1 0 1). SF6 decomposition components adsorption decreases the electrical conductivity of the adsorption system. According to the different change degrees of electrical conductivity, it can be used to recognize the type and concentration of each SF6 decomposition component. By building the relationship between the type and concentration of SF6 decomposition components, and the type and severity of discharge faults, it provides an effective online way to diagnose and evaluate the discharge faults in SF6-insulated equipment.