Carbon nanotubes decorated with fluorine-doped titanium dioxide (TiO2) nanoparticles on Silicon substrate serves as a template for improved TiO2 growth by chemical vapour deposition (CVD). The study analyses and characterizes several growth conditions for the template finding an optimum for enhanced photochemical activity. Even for non-optimized growth conditions for the CVD grown TiO2 enhancement in photochemical activity is observed when grown on proposed template. With the growth on cheap Si substrates the carbon nanotube-based photo-electrochemical (PEC) electrode has great potential to enhance the PEC activity of TiO2 grown by CVD at relative low temperature.