This contribution is a study of the crystal structures and crystal domains in the thin epitaxially growing films of [M(Pc)O]n (M = Si and Ge, Pc = phthalocyaninato) revealed by high-resolution electron microscopy. Microphases detectable only on the microscopic level were observed : (a) gamma-phase for [Si(Pc)O]n, orthorhombic system, a = 1.38 nm, b = 5.52 nm, c = 0.66 nm; and (b) alpha-phase for [Ge(Pc)O]n, base-centered orthorhombic, a = 1.33 nm, b = 2.66 nm, c = 0.35 nm. Translation and rotation crystal domains were visualized on the nanometeric scale. The high-resolution images are rich in irregularity and provide direct information on the defects and imperfections in the polymer films.