화학공학소재연구정보센터
Journal of Polymer Science Part B: Polymer Physics, Vol.32, No.15, 2475-2480, 1994
Density Profile of Spin Cast Polymethylmethacrylate Thin-Films
The density profiles of polymethylmethacrylate ( PMMA) thin films on silicon (111) single crystal wafers were investigated via neutron reflectivity measurements. Films were prepared by spin casting PMMA onto silicon wafers from o-xylene solution followed by annealing under vacuum at 90 degrees C for 5 h. A similar to 45 A thick layer at the free polymer surface was observed in the as-prepared samples that has a density about half the value of bulk PMMA. After heating above 110 degrees C, this diffuse layer disappeared and the thin film density profile was transformed to one with a sharp free polymer surface. This transition was found to be irreversible.