Perfluorocarbon monomers such as C2F4, C2F6, C4F10, and mixtures thereof with H-2, were subjected to plasma polymerization and deposited onto low-density polyethylene (LDPE) substrates. The effect of plasma conditions, surface characteristics, and surface dynamics of plasma polymers on their ability to improve the resistance to water vapor permeation was investigated. An optimum discharge energy density was found for a monomer which provided the greatest reduction water vapor permeability. Although all of the plasma polymers show higher hydrophobicity than polyethylene, the reduction in water vapor permeability is not uniquely related to water contact angle. The surface-dynamic stability of a plasma polymer surface was found to be the key factor in determining the barrier performance of the plasma polymer. The extent of change of surface-configuration after water immersion strongly correlated with the improvement in the water vapor permeation resistance. Plasma polymers with the higher surface-dynamic stability provided the better water barrier coating applied on LDPE films.