화학공학소재연구정보센터
Thin Solid Films, Vol.650, 7-10, 2018
Deposition of highly oriented (K,Na)NbO3 films on flexible metal substrates
In view of developing flexible, highly textured Pb-free piezoelectric thin films, (K,Na)NbO3 was deposited by chemical solution deposition on cube-textured Ni-W alloy substrates. After heat treatment, a strong (001()pc) out-of-plane preferential orientation is created in the (K,Na)NbO3 layer, which also exhibits a sharp in-plane texture with 45 degrees-rotated epitaxial relation to the substrate. The microstructure of the film is strongly dependent on the heat treatment temperature; sub-micrometer grains versus up to 2 mu m long particles forming at 600 degrees C and 900 degrees C respectively. K4Nb6O17 and (K1-xNax)(2)Nb4O11 impurity phases were identified depending on the processing temperature.