The short-wavelength response for traditional CdS/CdTe thin film solar cells was dramatically restricted by the CdS window layer. In order to increase short-wavelength light collection, we tried to replace CdS with MgxZn1-xO (MZO). The short-wavelength quantum efficiency (QE) response was obviously increased to more than 80% at 400 nm, while fill factor (FF) and open circuit voltage (V-oc) for CdTe solar cells were decreased. This decrease was mainly caused by the weak build-in potential formed by the MZO/CdTe heterojunction, which resulted in insufficient driving force to repel the photo-generated carriers. Hence, the thin CdS buffer layer was introduced between MZO and CdTe to improve the built-in potential. It efficiently increased the build-in potential from 0.369 to 0.579 V with an obvious improvement of FF and V-oc. But this interlayer caused QE losses to some degree in the short-wavelength region. To avoid these losses, a composite CdS/CdSe buffer layer was incorporated in the CdTe solar cells. CdSe acted as a protective layer to avoid the excessive CdS consumption during the high temperature deposition processing of the CdTe absorption layer. Meanwhile the formation of CdSexTe1-x by inter-diffusion extended the long-wavelength response. Thus, cell performance was enhanced with a relatively high build-in potential 0.517 V and a substantial improvement of the QE response.