Crystalline, spherical barium titanate fine powders with a narrow particle size distribution were prepared by ultrasonic spray pyrolysis. The stability of the starting solution was influenced by type of barium source and peptizer. The particle structure was influenced by the pyrolysis temperature of the barium source. The particle structure derived from barium acetate was dense, while powders derived from barium nitrate involved a lot of hollow particles. As-prepared powders were crystallized to a perovskite structure. Inductively coupled plasma analysis showed that the BaO/TiO2 molar ratio of as-prepared powders was 50.5:49.5. The effects of the concentration of the starting fluid, pyrolysis temperature and flow rate of carrier air through the furnace on powder characteristics such as particle size, size distribution and crystal phase were investigated. The particle size depended on the concentration of starting solution and the flow rate of carrier air, but the particle size distribution was independent of these variables. Single-phase BaTiO3 was obtained at more than 700 degrees C. The relative density of barium titanate sintered at 1200 degrees C was 98%. The hollow particles in the powders resulted in a low sintering density and a large grain size. The dielectric constant and tan delta of barium titanate at 25 degrees C were 4500 and 0.02, respectively.