It is important to fabricate stable p-type ZnO:Sb thermoelectric (TE) films for the p-n homojunction TE devices that convert waste heat directly into electricity. In this study, the ZnO: Sb films with different Sb contents were prepared by oxidizing evaporated Zn-Sb films in oxygen. The film with a high Sb content (5.32%) is easy to form Zn4Sb3 and ZnSb compound in the wurtzite ZnO. The resistivity has a sharply reduction with the Sb content from 0.228 Omega.m of 3.95% Sb to 4.68 x 10(-5) Omega.m of 5.32% Sb. The lowest resistivity is lower at least one order of magnitude than the results of others with the similar Sb content. The Seebeck coefficient indicates that the 5.32% Sb film remains stable p-type conduction. The carrier concentration is about 10(20) cm(-3) and is higher at least one order of magnitude than the other results. Raman analysis indicates that the peak of E-2(high) related O sublattice vibrations indicates that the O sites are substituted by Sb3+ ions, which increases the carrier concentration. However, the mobility is relatively weak because the intrinsic host lattice defects activated as vibrating complexes. The power factor of the p-type ZnO: Sb of the 5.32% Sb film at 427 degrees C is 46.79 mu W/m.K-2. (C) 2018 Elsevier B.V. All rights reserved.