Antimony (Sb)-doped tin oxide (ATO) nanoparticles with various doping amounts were prepared by solvothermal synthesis. ATO thin films were fabricated on glass substrates via spin coating using a prepared ATO nanoparticle suspension solution. The effect of doping amount and annealing temperature in production of thin film on Seebeck coefficient and electrical conductivity was investigated. The optimized doping conditions (2 mol % Sb and annealing temperature = 500 degrees C) produced ATO thin films exhibiting power factors (S-2 sigma), 64.4 mu Wm(-1) K-2 which is encouraging for synthesis using inexpensive and facile solution-processing procedures.