Nebulized spray deposited electrochromic oxide thin films have shown better performance in electrochromic application due to the formation of finer particles on the substrate surface and improved contact between the substrate surface and film. In the present work, anatase phase TiO2 thin films with excellent electrochromic performance were prepared using nebulized spray deposition technique. The influence of substrate temperature on the electrochromic performance of TiO2 thin films was studied. In addition, various physical properties of the films were studied. The film prepared at lower substrate temperature of 200 degrees C exhibit a high coloration efficiency of 260.7 mC cm (2) at 600 nm, fast switching kinetics (bleaching time = 1.7 s, coloration time = 2.37 s), high reversibility of 99% and consistent stability of about 1000 cycles. The present report suggests that the nebulized spray deposited TiO2 thin films can perform efficiently in electrochromic applications. (C) 2017 Elsevier Ltd. All rights reserved.