화학공학소재연구정보센터
Applied Chemistry, Vol.2, No.2, 745-748, October, 1998
액상유기화합물을 이용한 다이아몬드 필름증착에 있어서의 결정형태에 관한 연구
A study on crystal morphology of deposited diamond film using liquid organic compounds
Diamond film was synthesized on Molybdenum substrate by chemical reaction of liquid organic compounds and hydrogen gas using the plasma jet at atmospheric pressure. The morpholorgy of film deposited is cube (100) faces at the position of 6mm away from the film center regardless of a kind of organic compound. When the toluene has been used as precursor, a sharp diamond peak is observed at 1332 cm(-1) with the temperature conditon of 970 ℃. FWHM of 1332 cm(-1) peak is on order of 5.9 cm(-1). The presence of non-diamond carbon phase has been detected at the temperature of 1150 ℃.