In this study, the surface-chemistry-dependent hydrophobicity and antibacterial properties of ITO films were examined. After annealing of the films, their surface root-mean-square roughness increased and remained the same regardless of the annealing environment. However, depending on the annealing environment (O-2, N-2, Ar, or vacuum), the contact angle increased with increasing Sn2+ contents in the films. Furthermore, the antibacterial effect of the annealed films decreased regardless of the annealing environment. The depth-dependent chemical state determined by X-ray photoelectron spectroscopy showed an increase in the Sn content at the surfaces of all films. In particular, the as-grown film exhibited the highest Sn content at the surface and also the strongest antibacterial effect. (C) 2017 Elsevier B.V. All rights reserved.